Structural and optical properties of ZnO films obtained on mesoporous Sisubstrates by the method of HF magnetron sputtering

Authors

VALERIY KIDALOV
ALENA DYADENCHUK
YURIY BACHERIKOV
ANTON ZHUK
TETYANA GORBANIUK
IGOR ROGOZIN
VITALI KIDALOV

DOI

10.3906/fiz-1909-10

Abstract

In the present work, ZnO films were obtained on mesoporous silicon substrates by the method of HF magnetron sputtering of a metallic zinc target in reaction oxygen and argon gas medium. The properties of the ZnO films obtained on mesoporous substrates were studied depending on the ratio of the partial pressures of the working gases (argon/oxygen). X-ray analysis showed that in the process of deposition, the ZnO films of a hexagonal structure were formed. The effect of the porous layer on the structural and luminescent properties of the thin ZnO films was studied. The results showed that the porous silicon substrate reduces residual stresses and can be used for obtaining high-quality ZnO films.

Keywords

ZnO film, porous Si, HF magnetron sputtering

First Page

57

Last Page

66

Recommended Citation

KIDALOV, VALERIY; DYADENCHUK, ALENA; BACHERIKOV, YURIY; ZHUK, ANTON; GORBANIUK, TETYANA; ROGOZIN, IGOR; and KIDALOV, VITALI (2020) "Structural and optical properties of ZnO films obtained on mesoporous Sisubstrates by the method of HF magnetron sputtering," Turkish Journal of Physics: Vol. 44: No. 1, Article 6. https://doi.org/10.3906/fiz-1909-10
Available at: https://journals.tubitak.gov.tr/physics/vol44/iss1/6