Conversion efficiency calculations for EUV radiation emitted from laser-produced Tin plasmas

Authors

BETÜL ATALAY
NECLA KENAR
ARİF DEMİR

DOI

10.3906/fiz-0903-5

Abstract

Ni-like and Co-like EUV radiation between 11--17 nm emitted from laser produced tin plasmas was modelled by using the hydrodynamic/atomic physics code EHYBRID. The atomic data were obtained using the Cowan code. The effects of driving laser pulse duration and the laser intensity with different wavelengths were investigated. The maximum conversion efficiency was calculated as 13.4% for a 266 nm Nd:YAG laser with 1 \times 10^{13} W/cm^2 pulse intensity and 5 ns pulse duration.

Keywords

Laser produced plasmas, plasma simulation, extreme ultraviolet radiation, lithography.

First Page

363

Last Page

369

Recommended Citation

ATALAY, BETÜL; KENAR, NECLA; and DEMİR, ARİF (2009) "Conversion efficiency calculations for EUV radiation emitted from laser-produced Tin plasmas," Turkish Journal of Physics: Vol. 33: No. 6, Article 6. https://doi.org/10.3906/fiz-0903-5
Available at: https://journals.tubitak.gov.tr/physics/vol33/iss6/6