Turkish Journal of Physics
DOI
-
Abstract
A 3-D silicon Hall effect sensor for precise angular-position measurement over 360° rotation is presented. This vector microtransducer functionally integrates into a common sensor region two parallel-field Hall devices for in-plane components of the magnetic field and one orthogonal Hall version for the perpendicular for the chip magnetic field. The advantages of this magnetometer are its low channel cross-sensitivities, remarkable simplified device design and high spatial resolution.
Keywords
Magnetometers, Integrated Hall sensors, Angular position, errors estimation.
First Page
97
Last Page
102
Recommended Citation
DIMITROV, KONSTANTIN VESELINOV (2007) "A 3-D Hall Sensor for Precise Angular Position Measurements," Turkish Journal of Physics: Vol. 31: No. 2, Article 5. Available at: https://journals.tubitak.gov.tr/physics/vol31/iss2/5
