Turkish Journal of Physics
Abstract
A 3-D silicon Hall effect sensor for precise angular-position measurement over 360° rotation is presented. This vector microtransducer functionally integrates into a common sensor region two parallel-field Hall devices for in-plane components of the magnetic field and one orthogonal Hall version for the perpendicular for the chip magnetic field. The advantages of this magnetometer are its low channel cross-sensitivities, remarkable simplified device design and high spatial resolution.
DOI
-
Keywords
Magnetometers, Integrated Hall sensors, Angular position, errors estimation.
First Page
97
Last Page
102
Recommended Citation
DIMITROV, K. V (2007). A 3-D Hall Sensor for Precise Angular Position Measurements. Turkish Journal of Physics 31 (2): 97-102. https://doi.org/-
