Effect of Development Time on Polymer Phase Separation in a PMMA Resist

Authors

MOHAMMAD NAEEM KHALID
SHAZIA YASIN
MOHAMMAD RIAZ KHAN

DOI

-

Abstract

Developer composition type and development technique are known to influence surface and edge roughness in polymethylemethacrylate (PMMA); and it is during development, we believe, that the result is most influenced by the phase separation into polymer-rich and polymer-poor regions. This polymer phase separation is more prominent in a weaker developer and low temperature. In this paper, we investigate the effect of development time on the extent of polymer phase separation in an exposed PMMA developed in a standard developer i.e. 1:3 MIBK:IPA at 20 °C and rinsed in pure IPA for 30 sec. The polymer phase separation is found to increase with the development time.

Keywords

e-beam; surface roughness; PMMA; phase separation; develop time.

First Page

271

Last Page

276

Recommended Citation

KHALID, MOHAMMAD NAEEM; YASIN, SHAZIA; and KHAN, MOHAMMAD RIAZ (2004) "Effect of Development Time on Polymer Phase Separation in a PMMA Resist," Turkish Journal of Physics: Vol. 28: No. 4, Article 8. Available at: https://journals.tubitak.gov.tr/physics/vol28/iss4/8