A Novel Radiative Substrate Heater

Authors

ABDULLAH CEYLAN
ERDAL KAYNAK
ŞADAN ÖZCAN
TEZER FIRAT

Abstract

In this work, we have developed a new low cost radiative substrate heater for deposition of high-T_c superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ~ 800 °C substrate temperature with it by using only one 250 W halogen projector bulb.

DOI

-

Keywords

Substrate heater, Magnetron sputtering, YBa_2Cu_3O_{7-\delta} thin film.

First Page

265

Last Page

269

Recommended Citation

CEYLAN, A, KAYNAK, E, ÖZCAN, Ş, & FIRAT, T (2004). A Novel Radiative Substrate Heater. Turkish Journal of Physics 28 (4): 265-269. https://doi.org/-