A Novel Radiative Substrate Heater

Authors

ABDULLAH CEYLAN
ERDAL KAYNAK
ŞADAN ÖZCAN
TEZER FIRAT

DOI

-

Abstract

In this work, we have developed a new low cost radiative substrate heater for deposition of high-T_c superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ~ 800 °C substrate temperature with it by using only one 250 W halogen projector bulb.

Keywords

Substrate heater, Magnetron sputtering, YBa_2Cu_3O_{7-\delta} thin film.

First Page

265

Last Page

269

Recommended Citation

CEYLAN, ABDULLAH; KAYNAK, ERDAL; ÖZCAN, ŞADAN; and FIRAT, TEZER (2004) "A Novel Radiative Substrate Heater," Turkish Journal of Physics: Vol. 28: No. 4, Article 7. Available at: https://journals.tubitak.gov.tr/physics/vol28/iss4/7