Turkish Journal of Physics
DOI
-
Abstract
The thermionic vacuum arc (TVA) discharge with evaporating anodes employing directly heated thermionic cathodes is investigated. The TVA discharge generates a pure, gas-free metal vapor plasma containing ions with a directed energy. The TVA is strongly controlled by the cathodic electron beam and there is a quite good stability of important operation parameters like the arc voltage and the arc current.
Keywords
Copper, discharge, plasma processing, vacuum arc
First Page
69
Last Page
76
Recommended Citation
AKAN, TAMER (2003) "Operation Parameters of The Thermionic Vacuum Arc Discharge," Turkish Journal of Physics: Vol. 27: No. 1, Article 7. Available at: https://journals.tubitak.gov.tr/physics/vol27/iss1/7
