Turkish Journal of Physics
Abstract
The thermionic vacuum arc (TVA) discharge with evaporating anodes employing directly heated thermionic cathodes is investigated. The TVA discharge generates a pure, gas-free metal vapor plasma containing ions with a directed energy. The TVA is strongly controlled by the cathodic electron beam and there is a quite good stability of important operation parameters like the arc voltage and the arc current.
DOI
-
Keywords
Copper, discharge, plasma processing, vacuum arc
First Page
69
Last Page
76
Recommended Citation
AKAN, T (2003). Operation Parameters of The Thermionic Vacuum Arc Discharge. Turkish Journal of Physics 27 (1): 69-76. https://doi.org/-
