Operation Parameters of The Thermionic Vacuum Arc Discharge

Authors

TAMER AKAN

DOI

-

Abstract

The thermionic vacuum arc (TVA) discharge with evaporating anodes employing directly heated thermionic cathodes is investigated. The TVA discharge generates a pure, gas-free metal vapor plasma containing ions with a directed energy. The TVA is strongly controlled by the cathodic electron beam and there is a quite good stability of important operation parameters like the arc voltage and the arc current.

Keywords

Copper, discharge, plasma processing, vacuum arc

First Page

69

Last Page

76

Recommended Citation

AKAN, TAMER (2003) "Operation Parameters of The Thermionic Vacuum Arc Discharge," Turkish Journal of Physics: Vol. 27: No. 1, Article 7. Available at: https://journals.tubitak.gov.tr/physics/vol27/iss1/7