Turkish Journal of Physics
Etching of Alumina and Polycarbonate Using a KrF Excimer Laser
A KrF excimer laser operating at a wavelength of 248 nm was used to etch ceramic and polymer materials by direct ablation. Mesh pattern and circular holes were engraved in these materials and a Scanning Electron Microscope was used to analyse the results of the etching process. Etching rates of 0. 065-0.185 \mum/pulse for the ceramic and 0.5-1.06 \mum/pulse for the polymer were achieved using laser pulse energies on a target between 0.7-4. 0 mJ.
HAMOUDI, Walid K. (1997) "Etching of Alumina and Polycarbonate Using a KrF Excimer Laser," Turkish Journal of Physics: Vol. 21: No. 7, Article 3. Available at: https://journals.tubitak.gov.tr/physics/vol21/iss7/3