Influence of the Impurity S on Heat-Stability of MIS-Structures on the Basis of Silicon

Authors

S. I. VLASOV
A. A. NASIROV
P. B. PARCHINSKIY

DOI

-

Abstract

Influence of S impurity on the heat-stability of MIS structures has been researched. Possibility of increasing heat-stability of MIS structures based on silicon has been shown.

First Page

1211

Last Page

1214

Recommended Citation

VLASOV, S. I.; NASIROV, A. A.; and PARCHINSKIY, P. B. (1996) "Influence of the Impurity S on Heat-Stability of MIS-Structures on the Basis of Silicon," Turkish Journal of Physics: Vol. 20: No. 11, Article 6. Available at: https://journals.tubitak.gov.tr/physics/vol20/iss11/6