Influence of the Impurity S on Heat-Stability of MIS-Structures on the Basis of Silicon

Authors

S. I. VLASOV
A. A. NASIROV
P. B. PARCHINSKIY

Abstract

Influence of S impurity on the heat-stability of MIS structures has been researched. Possibility of increasing heat-stability of MIS structures based on silicon has been shown.

DOI

-

First Page

1211

Last Page

1214

Recommended Citation

VLASOV, S. I, NASIROV, A. A, & PARCHINSKIY, P. B (1996). Influence of the Impurity S on Heat-Stability of MIS-Structures on the Basis of Silicon. Turkish Journal of Physics 20 (11): 1211-1214. https://doi.org/-