On an electrostatic micropump with a rigorous mathematical model

Authors

İBRAHİM EFE
FATİH DİKMEN
YURY TUCHKIN

DOI

10.55730/1300-0632.3812

Abstract

The novel electrostatic micropump model for applications such as in biomedical drug delivery is presented. The geometrical arrangement of the coupling rigid electrodes lets us exploit our mathematically rigorous boundary integral equation formulation and its solution. Thus, the charge densities involving the fringe effects on the plates are obtained by means of analytical regularization method (ARM) constructed for annular strips earlier. The efficiency of the constructed method is demonstrated with respect to the direct integral equation solvers implemented via the entire domain Galerkin method and point matching. The main physical characteristics of the suggested system and their deviation from that of infinitely large plane approximation are discussed.

Keywords

Electrostatic pump, numerical simulation, integral equation, analytical regularization, orthogonal polynomials method

First Page

805

Last Page

817

Recommended Citation

EFE, İBRAHİM; DİKMEN, FATİH; and TUCHKIN, YURY (2022) "On an electrostatic micropump with a rigorous mathematical model," Turkish Journal of Electrical Engineering and Computer Sciences: Vol. 30: No. 3, Article 21. https://doi.org/10.55730/1300-0632.3812
Available at: https://journals.tubitak.gov.tr/elektrik/vol30/iss3/21