Operation Parameters of The Thermionic Vacuum Arc Discharge


Abstract: The thermionic vacuum arc (TVA) discharge with evaporating anodes employing directly heated thermionic cathodes is investigated. The TVA discharge generates a pure, gas-free metal vapor plasma containing ions with a directed energy. The TVA is strongly controlled by the cathodic electron beam and there is a quite good stability of important operation parameters like the arc voltage and the arc current.

Keywords: Copper, discharge, plasma processing, vacuum arc

Full Text: PDF